Modification of plasma reactor and matching with pulse power

NIE Yong, LI Wei,SHI Yao, TAN Tian-en

Advanced Technology of Electrical Engineering and Energy ›› 2004, Vol. 23 ›› Issue (2) : 64-68.

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PDF(170 KB)
Advanced Technology of Electrical Engineering and Energy ›› 2004, Vol. 23 ›› Issue (2) : 64-68.
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Modification of plasma reactor and matching with pulse power

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2004, 23(2): 64-68

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